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Altagamoa Al Khames, Main centre of town, end of 90th Street
New Cairo
Egypt
Faculty of Engineering & Technology
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List of Courses

Microsystems Technology

  • Course Code :
    ELE 524
  • Level :
    Undergraduate
  • Course Hours :
    3.00 Hours
  • Department :
    Department of Electrical Engineering

Instructor information :

Area of Study :

 Introduce advanced semiconductor devices  Develop a detailed understanding of the fabrication technology of semiconductor electronic, optoelectronic devices and microelectromechanical devices.  Introducing the design parameters, performance parameters and CAD models, etc.

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Microsystems Technology

Physical principles, Design, and micro fabrication technologies pertinent to input (sensor) and output (actuator) devices for multimedia applications such as document and video imaging devices, Micro mirror projection displays and micro-electro-mechanical systems.

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Microsystems Technology


Course outcomes:

a. Knowledge and Understanding:

1- Describe the basic operation of advanced semiconductor, optical devices and MEMS and their characteristics.
2- Define design features that determine the device characteristics.
3- Define the device models for circuit simulation.

b. Intellectual Skills:

1- Develop analytical models for the advanced semiconductor, optical devices and MEMS.
2- Use device models for circuit simulation
3- Use semiconductor, optical devices and MEMS for material and process characterization.
4- Examine a detailed understanding of the many and diverse aspects that relate to the operation and exploitation of semiconductor devices.

c. Professional and Practical Skills:

1- - Develop a practical circuit simulation using compact device models
2- Develop technical report writing skills
3- Design, model and analyze a number of semiconductor advanced semiconductor, optical devices and MEMS types.

d. General and Transferable Skills:

1- d1- Communicate effectively.
2- d2- Demonstrate Efficient IT capabilities using modern software tools


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Microsystems Technology

Course topics and contents:

Topic No. of hours Lecture Tutorial/Practical
Introduction to Microsystems, Microfabrication 5 3 2
Microfabrication – Cleaning, Oxidation, Doping, bonding 5 3 2
Microfabrication – lithography, Process development 5 3 2
Review basic mechanical concepts, pressure sensor 5 3 2
Piezoresistance, Piezoelectricity 5 3 2
Radiation sensing – theory, Optical sensors – photodiodes 10 6 4
Optical – CCDs, LED, LCD 15 9 6
High energy radiation detectors, Biochemical sensing, Hall effect 10 6 4
GMR read/write heads 5 3 2
Noise – characteristics of random noise, sources and analysis 10 6 4

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Microsystems Technology

Teaching And Learning Methodologies:

Teaching and learning methods
Interactive Lecturing
Problem Solving
Discussion
Experiential Learning

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Microsystems Technology

Course Assessment :

Methods of assessment Relative weight % Week No. Assess What
Assignments 5.00
Final Exam 40.00
Lab and Project 15.00
Mid Term I 15.00
Mid Term II 15.00
Quizzes 10.00

For further information :

Microsystems Technology

Books:

Book Author Publisher

Course notes :

Taken by the student inside classroom

Recommended books :

- Microsystem Design, Stephen Senturia, Springer, 2001. - Device Electronics for Integrated Circuits. 3rd Ed, R. Muller R. Kamins and M. Chan, Wiley, 2002. - Foundation of MEMS, Chang Liu, 2nd Ed., Prentice Hall, 2011.

Periodicals :

- IEEE periodicals, Nanohub.org

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