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Altagamoa Al Khames, Main centre of town, end of 90th Street
New Cairo
Egypt
Faculty of Engineering & Technology
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List of Courses

Introduction to Micro- Elector Mechanical Systems (MEMS)

  • Course Code :
    MKT 507
  • Level :
    Undergraduate
  • Course Hours :
    2.00 Hours
  • Department :
    Department of Mechanical Engineering

Instructor information :

Area of Study :

 Enrich the student’s understanding of the Micro Systems and their working principles  Develop the student’s ability to apply the different design principles on different micro devices.  Enrich the students understanding of micro-systems fabrication processes.

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Introduction to Micro- Elector Mechanical Systems (MEMS)

Overview of micro-systems, common micro-systems and their working principles, mechanical modeling and simulation of MEMS, scaling laws in miniaturization, material for MEMS and micro-systems, mechanical design of micro devices, mechanical packaging of micro devices, overview on micro-systems fabrication processes.

For further information :

Introduction to Micro- Elector Mechanical Systems (MEMS)


Course outcomes:

a. Knowledge and Understanding:

1- Understand the different fabrication processes involved in MEMS fabrication.
2- Comprehend the different factors and principles associated with the design of a microsystem.
3- Understand the different working principles of the common microsystems.

b. Intellectual Skills:

1- Analyse the different working principles and fabrication processes on a specific device from literature in term project
2- Apply the different fabrication process on several MEMS sensors and actuators.
3- Analyse the forces and design principles on different MEMS devices.

c. Professional and Practical Skills:

1- Present a technical report on a specific MEMS sensor or an actuator.
2- Review literature to analyze different working principles and fabrication processes on a specific device in term project

d. General and Transferable Skills:

1- Present the project in a technical report and power point presentation.
2- Submit on time assignments and project.
3- Review different sources of literature for term project.


For further information :

Introduction to Micro- Elector Mechanical Systems (MEMS)

Course topics and contents:

Topic No. of hours Lecture Tutorial/Practical
Course Outline Overview of MEMS and Microsystems 4 2 2
Working Principles of Microsystems 8 4 4
Engineering Science for Microsystems Design and Manufacturing 4 2 2
Engineering Mechanics for Microsystem Design 8 4 4
Scaling Law in Miniaturization 4 2 2
Materials for MEMS and Microsystems 4 2 2
Microsystems Fabrication Processes 6 4 4
Overview of Micromanufacturing 4 2 2

For further information :

Introduction to Micro- Elector Mechanical Systems (MEMS)

Teaching And Learning Methodologies:

Teaching and learning methods
Interactive Lecturing
Problem solving
Project

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Introduction to Micro- Elector Mechanical Systems (MEMS)

Course Assessment :

Methods of assessment Relative weight % Week No. Assess What
1st Midterm 15.00 6
2nd Midterm 15.00 11
Attendance and class participation 10.00
Final Exam 40.00 16
Project 20.00 14

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Introduction to Micro- Elector Mechanical Systems (MEMS)

Books:

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